MEMS Artificial Lateral Line

The artificial lateral line is develop using MEMS (MicroElectroMechanical Systems) technology in National Nanotechnology Laboratory (Lecce, Italy).
The lateral line sensors mimic superficial neuromasts of a fish lateral line organ. They are small cantilevers that bend in flow.
MEMS microfabrication technology is based on mechanical and electronic properties of Nitride-based materials (Aluminum Nitride or Silicon Nitride). Piezoelectricity and piezoresistivity are the sensing mechanisms that permit us translating the cantilever bending into electrical signals.

The sensors are tested and characterized to see how they respond to bending

The individual sensors will be inserted in chip carriers together with the wiring. The chips will then be mounted on the FILOSE fish robot.